Plasma reactor with highly symmetrical four-fold gas injection

ABSTRACT

An annular lid plate of a plasma reactor has upper and lower layers of gas distribution channels distributing gas along equal length paths from gas supply lines to respective gas distribution passages of a ceiling gas nozzle.

BACKGROUND

1. Technical Field

The disclosure pertains to a gas injection system for a plasma reactoremployed in processing a workpiece such as a semiconductor wafer.

2. Background Discussion

Control of process gas distribution in the chamber of a plasma reactoraffects process control of etch rate distribution or deposition ratedistribution on a workpiece during plasma processing. A tunable gasinjection nozzle mounted on the chamber ceiling may have differentinjection slits directed to different zones, such as a center zone and aside zone. Separate gas inputs may feed the different injection slits,and separate flow rate control may be provided for each gas input. Eachgas input may feed different portions of the corresponding injectionslit through different gas flow paths. It is desirable that thedifferent gas flow paths from a particular gas input be of equallengths, for the sake of uniformity. However, it has not seemed possibleto make the gas input-to-nozzle path lengths equal for all inputs andnozzles, leading to non-uniformities in gas distribution.

SUMMARY

An annular lid plate in a gas delivery system for a plasma reactorchamber with a gas nozzle of inner and outer gas injection passages. Theannular lid plate defines a central opening and comprises: (a) first andsecond pluralities of gas outlets coupled to respective ones of theinner and outer gas injection passages, the gas outlets in each of thefirst and second pluralities of gas outlets being spaced apart by afirst arc length, (b) a gas delivery block comprising first and secondgas supply passages and (c) first and second pluralities of gasdistribution channels in respective upper and lower levels. Each of thefirst and second pluralities of gas distribution channels comprises: (a)an arcuate gas delivery channel having a pair of ends connected to acorresponding pair of the gas outlets, and (b) an arcuate gas supplychannel comprising an input end connected to a corresponding one of thefirst and second gas supply passages, and an output end coupled to amiddle zone of the arcuate gas delivery channel.

In an embodiment, the gas delivery block is disposed at a location thatis offset from the output end of each of the gas supply channels by asecond arc length such that the gas supply channels of the first andsecond pluralities of gas delivery channels are of the same length.

In an embodiment, the gas outlets of the first and second pluralities ofgas outlets are distributed with respect to a circumference of theannular lid plate, and the first plurality of gas outlet alternates withthe second plurality of gas outlets along the circumference.

In a related embodiment, the first plurality of gas outlets comprises afirst pair of gas outlets and the arc length corresponds to a halfcircle, and the second plurality of gas outlets comprises a second pairof gas outlets offset from the first pair of gas outlets by a quartercircle.

In a further related embodiment, the gas delivery block is disposed at alocation that is offset from the output end of each of the gas supplychannels by an arc length of a quarter circle.

In one embodiment, each of the first and second pluralities of gasdistribution channels further comprises a flow transition elementconnected between the output end of the gas supply channel and themiddle zone of the gas delivery channel. The flow transition elementcomprises: (a) a radial transition conduit, (b) an axial input conduitcoupled between the output end of the gas supply channel and one end ofthe radial transition conduit, and (c) an axial output conduit connectedbetween the middle zone of the gas feed channel and the other end of theradial transition conduit.

In an embodiment, the axial input conduit meets an opening in the outputend of the gas supply channel, and the axial output conduit meets anopening in the middle zone of the gas feed channel.

In a further embodiment, the gas nozzle comprises: (a) a first pluralityof radial elevated feed lines having respective input ends coupled torespective ones of the first plurality of gas outlets and respectiveoutput ends overlying the inner gas injection passage, (b) a secondplurality of radial elevated feed lines having respective input endscoupled to respective ones of the second plurality of gas outlets andrespective output ends overlying the inner gas injection passage, (c) afirst plurality of axial drop lines connected between the respectiveoutput ends and the inner gas injection passages, (d) a second pluralityof axial drop lines connected between the respective output ends and theouter gas injection passages.

In a related embodiment, (a) the first plurality of axial drop linesintersect the inner gas injection passage at respective drop pointsevenly spaced along the inner gas injection passage, and (b) the secondplurality of axial drop lines intersect the outer gas injection passageat respective drop points evenly spaced along the outer gas injectionpassage.

In a related embodiment, the gas nozzle further comprises: (a) a firstplurality of supply ports evenly spaced around a periphery of the gasnozzle and connected to respective ones of the first plurality of gasoutlets, (b) a second plurality of supply ports evenly spaced around aperiphery of the gas nozzle and connected to respective ones of thesecond plurality of gas outlets, and offset from the first plurality ofgas supply ports, (c) wherein the first plurality of supply ports areconnected to respective pairs of the first plurality of radial elevatedfeed lines, and the second plurality of supply ports are connected torespective pairs of the second plurality of radial elevated feed lines.

In related embodiment further comprises: (a) a first plurality of radialgas delivery conduits connected between respective ones of the firstplurality of gas outlets and the first plurality of supply ports, and(b) a second plurality of radial gas delivery conduits connected betweenrespective ones of the second plurality of gas outlets and the secondplurality of supply ports.

In accordance with a related aspect, an annular lid plate for a plasmareactor comprises: (a) first and second pluralities of gas outlets, thegas outlets in each of the first and second pluralities of gas outletsbeing spaced apart by a first arc length, (b) a gas delivery blockcomprising first and second gas supply passages, (c) first and secondpluralities of gas distribution channels in respective upper and lowerlevels. Each of the first and second pluralities of gas distributionchannels comprises: (a) an arcuate gas delivery channel having a pair ofends connected to a corresponding pair of the gas outlets, and (b) anarcuate gas supply channel comprising an input end connected to acorresponding one of the first and second gas supply passages, and anoutput end coupled to a middle zone of the arcuate gas delivery channel.

In one embodiment of the annular lid plate, the gas delivery block isdisposed at a location that is offset from the output end of each of thegas supply channels by a second arc length such that the gas supplychannels of the first and second pluralities of gas delivery channelsare of the same length.

In a one embodiment of the annular lid plate, the gas outlets of thefirst and second pluralities of gas outlets are distributed with respectto a circumference of the annular lid plate, and wherein the firstplurality of gas outlet alternates with the second plurality of gasoutlets along the circumference.

In a related embodiment of the annular lid plate, the first plurality ofgas outlets comprises a first pair of gas outlets and the arc lengthcorresponds to a half circle, and the second plurality of gas outletscomprises a second pair of gas outlets offset from the first pair of gasoutlets by a quarter circle.

In an embodiment of the annular lid plate, the gas delivery block isdisposed at a location that is offset from the output end of each of thegas supply channels by an arc length of a quarter circle.

In a further embodiment, of the annular lid plate, each of the first andsecond pluralities of gas distribution channels further comprises a flowtransition element connected between the output end of the gas supplychannel and the middle zone of the gas delivery channel. In oneembodiment, the flow transition element comprises: (a) a radialtransition conduit, (b) an axial input conduit coupled between theoutput end of the gas supply channel and one end of the radialtransition conduit, and (c) an axial output conduit connected betweenthe middle zone of the gas feed channel and the other end of the radialtransition conduit.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the exemplary embodiments of the presentinvention are attained can be understood in detail, a more detaileddescription of the invention, briefly summarized above, may be obtainedby reference to the embodiments thereof which are illustrated in theappended drawings. It is to be appreciated that certain well knownprocesses are not discussed herein in order to not obscure theinvention.

FIG. 1A is a partially cut-away elevational view of a reactor chamber inaccordance with one embodiment.

FIG. 1B is a plan view corresponding to FIG. 1A.

FIGS. 2 and 3A are top and bottom views, respectively, of a gas deliverylid plate of the embodiment of FIG. 1.

FIG. 3B is a cross-sectional view along lines 3B-3B of FIG. 3A.

FIG. 4 is an enlarged view of a portion of FIG. 2.

FIG. 5 is a cross-sectional view taken along lines 5-5 of FIG. 2.

FIG. 6 is a cross-sectional view taken along lines 6-6 of FIG. 2.

FIG. 7 is a cut-away plan view of a gas delivery hub of the embodimentof FIG. 1.

FIG. 8 is a cut-away cross-sectional view taken along lines 8-8 of FIG.7.

FIG. 9 is a cut-away cross-sectional view taken along lines 9-9 of FIG.7.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements and features of oneembodiment may be beneficially incorporated in other embodiments withoutfurther recitation. It is to be noted, however, that the appendeddrawings illustrate only exemplary embodiments of this invention and aretherefore not to be considered limiting of its scope, for the inventionmay admit to other equally effective embodiments.

DETAILED DESCRIPTION

The problem to be solved involves gas delivery to injectors through gaschannels formed in a lid plate of the chamber. The lid plate in somedesigns is annular and defines a circular center opening framing adielectric window through which RF power is coupled into the chamber.All the gas inputs are adjacent one another at a gas supply block,complicating the gas delivery. In order that all the gas flow paths fromeach gas input be of equal lengths, it has been necessary for the gaschannels to provide recursive paths that reverse direction abruptly.This introduces turbulence, with effects that hamper process control.Moreover, the recursive gas channels occupy a large area, requiring theannular lid plate to be of a large area, which limits the size of thedielectric window relative to the chamber, a significant problem.Further, depending upon the location of the gas supply block, the pathlengths differ significantly.

The tunable gas nozzle has circular channels feeding its differentinjection slits. Gas feed to the tunable gas nozzle from each gas inputis along a straight gas line, which must intersect the correspondingcircular channel. However, the momentum of the gas fed to the circularchannel is along a single direction, and therefore the gas flow from thestraight-line path has a preference for a single rotational direction inthe circular channel of the tunable gas nozzle. This leads toundesirable asymmetry and non-uniformity.

Embodiments described below provide gas distribution that is completelysymmetrical, having uniform path lengths for all gas inputs, and havinggas distribution channels without abrupt path reversals in the plane ofchannels, and occupying a smaller annular area. Further provided is agas feed to the tunable gas injection nozzle that has minimal or nodirectional preference in the manner in which gas is introduced into thecircular channels of the tunable gas injection nozzle.

Referring to FIG. 1A, a plasma reactor includes a vacuum chamber 100enclosed by a cylindrical side wall 102 and a ceiling 104. A workpiecesupport pedestal 106 within the chamber 100 faces the ceiling 104. Theceiling 104 includes an annular lid plate 110 having a circular centralopening 110 a, and a disk-shaped dielectric window 112 framed by thecentral opening 110 a. A tunable gas injection nozzle 114 faces into thevacuum chamber 100 through the center of the dielectric window 112 andhas inner and outer circular gas injection passages 116, 118 fed by agas distribution hub 120. The inner gas injection passage 116 isvertical and directs process gas to an inner gas injection zone, whilethe outer gas injection passage 118 is angled outwardly and directsprocess gas to an outer gas injection zone. The gas distribution hub 120feeds the inner and outer gas injection passages 116, 118 separately, aswill be described later in this specification.

Process gas is received at a gas delivery block 124 and is distributedto different ports of the gas distribution hub 120 through upper andlower groups of gas distribution channels 130, 140 inside the annularlid plate 110. The upper group of gas distribution channels 130 (FIG.1A) are at an upper plane near a top surface of the annular lid plate110, while the lower group of gas distribution channels 140 (FIG. 1A)are at a lower plane near a bottom surface of the annular lid plate 110.

Referring to FIG. 1B, the gas distribution hub 120 has a first opposingpair of gas supply ports 120-1, 120-2 coupled to the outer gas injectionpassage 118, and a second opposing pair of gas supply ports 120-3 and120-4 coupled to the inner gas injection passage 116. A first pair ofradial gas delivery conduits 150, 152 overlying the dielectric window112 are connected between the pair of gas supply ports 120-1, 120-2,respectively, and the upper group of gas supply channels 130 in theannular lid plate 110. A second pair of radial gas delivery conduits154, 156 overlying the dielectric window 112 are connected between thepair of gas supply ports 120-3, 120-4, respectively, and the lower groupof gas supply channels 140 in the annular lid plate 110. The gas supplyports 120-1 through 120-4 are disposed at 90 degree intervals around theperiphery of the hub 120. In one embodiment, the four radial gasdelivery conduits 150, 152, 154, 156 are evenly distributed at 90 degreeintervals relative to the circumference of the annular lid plate 110 andextend radially.

The gas delivery block 124 extends outwardly from a peripheral edge ofthe annular lid plate 110, and includes an upper gas inlet 162 connectedto the upper group of gas distribution channels 130 and a lower gasinlet 164 connected to the lower group of gas distribution channels 140.The gas delivery block 124 is located along the circumference of theannular lid plate 110 at a 45 degree angular position relative to theadjacent radial gas delivery conduits 150 and 154.

The top view of FIG. 2 best shows the upper group of gas distributionchannels 130, while the bottom view of FIG. 3A best shows the lowergroup of gas distribution channels 140. Providing the gas channels asthe upper and lower groups of gas distribution channels 130 and 140avoids spatial constraints or conflicts between them and permits them tobe symmetrically configured as mirror images of one another, leading togreater uniformity.

The upper group of gas distribution channels 130 referred to in FIGS. 1Aand 1B is depicted in FIG. 2 and includes an arcuate gas supply channel132 having an input end 132-1 coupled to the upper gas inlet 162 of thegas delivery block 124 (FIG. 4) and an outlet end 132-2 coupled to aninternal flow transition element 134 shown in FIG. 5. The arcuate gassupply channel 132 subtends 45 degrees of arc between its two ends 132-1and 132-2. The connections to the gas delivery block 124 including theupper gas inlet 162 are best shown in the enlarged view of FIG. 4.

The upper group of gas distribution channels 130 further includes anarcuate gas feed channel 136 subtending 180 degrees of arc between apair of ends 136-1, 136-2. The ends 136-1 and 136-2 include axial gasopenings 137-1 and 137-2, that are coupled to radially outward ends150-1 and 152-1 of the gas conduits 150 and 152, respectively. The axialgas opening 137-2 is shown in the enlarged view of FIG. 6. The flowtransition element 134 of FIG. 5 provides a connection from the outletend 132-2 of the gas distribution channel 132 to a middle zone 136-3 ofthe arcuate gas feed channel 136.

Referring to FIG. 5, the flow transition element 134 includes a radialtransition conduit 170 beneath the outlet end 132-2. An axial inputconduit 172 is coupled between the outlet end 132-2 of the gas supplychannel 132 and one end of the radial transition conduit 170. An axialoutput conduit 174 is coupled between the middle zone 136-3 of the gasfeed channel 136 and the other end of the radial transition conduit 170.The axial input conduit 172 meets an opening in the bottom of the outletend 132-2 of the gas supply channel 132. The axial output conduit 174meets an opening in the bottom of the middle zone 136-3 of the gas feedchannel 136.

The gas supply channel 136 has two halves on either side of the middlezone 136-3, in which gas flow is in opposite rotational directions. Aproblem solved by the flow transition element 134 is how to evenlydistribute gas flow in the two halves of the gas distribution channel136 given the counter-clockwise direction of gas flow in the gas supplychannel 132. The axial input port 172 transforms the counter clockwisemomentum distribution of the gas flow from the gas supply channel end132-2 to an axial distribution, removing any preference for a particularrotational direction. The axial gas output port 174 enables the axialgas flow momentum to be evenly split between the opposite rotationaldirections in the two halves of the gas distribution channel 136. In oneembodiment, this provides uniform gas distribution.

The lower group of gas distribution channels 140 referred to in FIGS. 1Aand 1B is depicted in FIG. 3A and includes an arcuate gas supply channel232 having an input end 232-1 coupled to the lower gas inlet 164 of thegas delivery block 124 (FIG. 4) and an outlet end 232-2 coupled to aninternal flow transition element 234 similar to the flow transitionelement 134 described above with reference to FIG. 5. The arcuate gassupply channel 232 subtends 45 degrees of arc between its two ends 232-1and 232-2.

The lower group of gas distribution channels 140 further includes anarcuate gas feed channel 236 subtending 180 degrees of arc between apair of ends 236-1 and 236-2. The ends 236-1 and 236-2 are coupled toaxial gas passages 237-1 and 237-2. The axial gas passages 237-1 and237-2 extend to top surface 110 b of the annular lid plate 110, and arevisible in the top view of FIG. 2 as openings in the top surface 110 b.These openings are coupled to radially outward ends 154-1 and 156-1 ofthe gas conduits 154 and 156, respectively (FIG. 1B). The flowtransition element 234 provides a connection from the outlet end 232-2of the gas distribution channel 232 to a middle zone 236-3 of thearcuate gas feed channel 236.

Referring to FIG. 3B, the flow transition element 234 includes a radialtransition conduit 270 beneath the outlet end 232-2. An axial inputconduit 272 is coupled between the outlet end 232-2 of the gas supplychannel 232 and one end of the radial transition conduit 270. An axialoutput conduit 274 is coupled between the middle zone 236-3 of the gasfeed channel 236 and the other end of the radial transition conduit 270.The axial input conduit 272 meets an opening in the bottom of the outletend 232-2 of the gas supply channel 232. The axial output conduit 274meets an opening in the bottom of the middle zone 236-3 of the gas feedchannel 236.

As shown in FIGS. 2 and 3A, the upper and lower groups of gas channels130, 140 are virtually mirror images of one another, for virtuallyidentical gas flow characteristics, providing optimum uniformity in oneembodiment. This is facilitated by disposing the upper and lower groupsof gas channels 130, 140 in different (upper and lower) planes, avoidingspace occupancy conflicts between the two groups of gas channels. Thislatter feature permits the location of the gas delivery block 124 to bechosen without contraints from possible space conflicts between the twogroups of channels. Maximum symmetry is realized by locating the gasdelivery block 124, including the upper and lower gas inlets 162 and164, along the circular periphery of the annular lid plate 110 at alocation that is offset by about 45 degrees from the end 136-1 of thegas distribution channel 136, and by about 45 degrees from the end 236-1of the gas distribution channel 236. An advantage of this feature in oneembodiment is that the gas supply channel 132 in the upper group and thegas supply channel 232 in the lower group are of the same length. Thepath lengths of the gas distribution channels 136 and 236 are the same,and the path lengths of the upper and lower groups of gas channels 130,140 are the same, for optimum uniformity. By providing equal pathlengths to the gas axial gas passages 137-1, 137-2, 237-1 and 237-2, auniform distribution of gas flow rate is realized, permitting the userto adjust gas flow rates without being affected by built-innon-uniformities among the gas distribution channels.

The disposition of the upper and lower groups of gas channels 130, 140in different planes allows the gas channels to overlie one another,thereby reducing the annular area of the annular lid plate 110. Thisfeature increases the diameter of the central opening 110 a (FIG. 1A),enlarging the area of the dielectric window 112 for a given chamberdiameter.

Referring now to FIGS. 7, 8 and 9, the gas distribution hub 120 providesgas flow paths from the gas supply ports 120-1 and 120-2 to the annularouter gas injection passage 118 of the tunable nozzle 114. The gasdistribution hub 120 also provides gas flow paths from the gas supplyports 120-3 and 120-4 to the annular inner gas injection passage 116 ofthe tunable nozzle 114. In one embodiment, each of the inner and outergas injection passages 116, 118 may form a complete circle or annulus.However, as depicted in FIG. 7, the annular inner gas injection passage116 may be divided into four sections 116 a, 116 b, 116 c and 116 d,while the annular outer gas injection passage 118 may be divided intofour sections 118 a, 118 b, 118 c and 118 d.

Gas flow to the gas supply port 120-1 is split between a pair of radialelevated feed lines 302 and 306 that feed axial drop lines 304 and 308respectively. The radially inward ends of the radial elevated feed lines302 and 306 are elevated above the top of the annular outer gasinjection passage 118. Gas flow to the gas supply port 120-2 is splitbetween a pair of radial elevated feed lines 310 and 314 that feed axialdrop lines 312 and 316 respectively. The radially inward ends of theradial elevated feed lines 310 and 314 are elevated above the top of theannular outer gas injection passage 118.

The four axial drop lines 304, 308, 312 and 316 terminate at fouruniformly spaced locations along the annular outer gas injection passage118. The four axial drop lines 304, 308, 312 and 316 are elongateenclosed hollow lines. In one embodiment, each of the four axial droplines 304, 308, 312 and 316 is cylindrical and defines a hollow centerpassage.

Gas flow to the gas supply port 120-3 is split between a pair of radialelevated feed lines 318 and 322 that feed axial drop lines 320 and 324respectively. The radially inward ends of the radial elevated feed lines318 and 322 are elevated above the top of the annular inner gasinjection passage 116. Gas flow to the gas supply port 120-4 is splitbetween a pair of radial elevated feed lines 326 and 330 that feed axialdrop lines 328 and 332 respectively. The radially inward ends of theradial elevated feed lines 326 and 330 are elevated above the top of theannular inner gas injection passage 116. The four axial drop lines 320,324, 328 and 332 terminate at four uniformly spaced locations along theannular inner gas injection passage 116. The four axial drop lines 320,324, 328 and 332 are elongate enclosed hollow lines. In one embodiment,each of the four axial drop lines 320, 324, 328 and 332 is cylindricaland defines a hollow center passage.

A problem solved by the embodiment of FIGS. 7-9 may be understood byreference to FIG. 7. In FIG. 7, it is apparent that if the gas deliverylines 310, 314, 318 and 322 were not elevated but instead directly fedcorresponding ones of the annular inner and outer gas injection passages116 and 118, gas flow would be predominantly along a single rotationaldirection at each injection point. Thus for example, gas flow from thefeed line 310 to the annular outer gas injection passage 118 would be inthe counter clockwise direction at the intersection or feed point.Moreover, gas flow from the feed line 314 to the annular outer gasinjection passage 118 would be in the opposite (clockwise) direction atthe intersection or feed point. In this example, there would be littlegas flow to the section(s) of the annular outer gas injection passage118 between the gas feed lines 310 and 314, leading to non-uniformity.

This problem is solved in one embodiment by the provision of the axialdrop lines 304, 308, 312 and 316 to the annular outer gas injectionpassage 118 and the axial drop lines 320, 324, 328 and 332 to theannular inner gas injection passage 116. Each axial drop line transformsa distribution of gas flow momentum confined to a single direction (asreceived from an elevated gas feed line) to a distribution evenlydivided between clockwise and counter clockwise directions at aninjection point in the corresponding annular gas injection passage (116or 118), for a more uniform gas flow distribution.

While the foregoing is directed to embodiments of the present invention,other and further embodiments of the invention may be devised withoutdeparting from the basic scope thereof, and the scope thereof isdetermined by the claims that follow.

1. An annular lid plate for a plasma reactor, comprising: first andsecond pluralities of gas outlets, the gas outlets in each of said firstand second pluralities of gas outlets being spaced apart by a first arclength; a gas delivery block comprising first and second gas supplypassages; first and second pluralities of gas distribution channels inrespective upper and lower levels, each of said first and secondpluralities of gas distribution channels comprising: an arcuate gasdelivery channel having a pair of ends connected to a corresponding pairof said gas outlets; and an arcuate gas supply channel comprising aninput end connected to a corresponding one of said first and second gassupply passages, and an output end coupled to a middle zone of saidarcuate gas delivery channel.
 2. The annular lid plate of claim 1wherein said gas delivery block is disposed at a location that is offsetfrom the output end of each of the gas supply channels by a second arclength such that the gas supply channels of said first and secondpluralities of gas distribution channels are of equal lengths.
 3. Theannular lid plate of claim 1 wherein the gas outlets of said first andsecond pluralities of gas outlets are distributed with respect to acircumference of said annular lid plate, and wherein said firstplurality of gas outlets alternates with said second plurality of gasoutlets along said circumference.
 4. The annular lid plate of claim 1wherein said first plurality of gas outlets comprises a first pair ofgas outlets and said first arc length corresponds to a half circle, andsaid second plurality of gas outlets comprises a second pair of gasoutlets offset from said first pair of gas outlets by a quarter circle.5. The annular lid plate of claim 4 wherein said gas delivery block isdisposed at a location that is offset from the output end of each of thegas supply channels by an arc length of a quarter circle.
 6. The annularlid plate of claim 1 wherein each of said first and second pluralitiesof gas distribution channels further comprises a flow transition elementconnected between said output end of said gas supply channel and saidmiddle zone of said gas delivery channel.
 7. The annular lid plate ofclaim 6 wherein said flow transition element comprises: a radialtransition conduit displaced axially relative to said gas supplychannel; an axial input conduit coupled between said output end of saidgas supply channel and one end of said radial transition conduit; and anaxial output conduit connected between said middle zone of said gasdelivery channel and another end of said radial transition conduit. 8.The annular lid plate of claim 7 wherein said axial input conduit meetsan opening in said output end of said gas supply channel, and said axialoutput conduit meets an opening in said middle zone of said gas deliverychannel.
 9. A gas delivery system for a plasma reactor chamber,comprising: a gas nozzle comprising respective inner and outer gasinjection passages; an annular lid plate defining a central openingaround said gas nozzle and comprising: first and second pluralities ofgas outlets coupled to respective ones of said inner and outer gasinjection passages, the gas outlets in each of said first and secondpluralities of gas outlets being spaced apart by a first arc length; agas delivery block comprising first and second gas supply passages;first and second pluralities of gas distribution channels in respectiveupper and lower levels, each of said first and second pluralities of gasdistribution channels comprising: an arcuate gas delivery channel havinga pair of ends connected to a corresponding pair of said gas outlets;and an arcuate gas supply channel comprising an input end connected to acorresponding one of said first and second gas supply passages, and anoutput end coupled to a middle zone of said arcuate gas deliverychannel.
 10. The gas delivery system of claim 9 wherein said gasdelivery block is disposed at a location that is offset from the outputend of each of the gas supply channels by a second arc length such thatthe gas supply channels of said first and second pluralities of gasdistribution channels are of equal lengths.
 11. The gas delivery systemof claim 9 wherein the gas outlets of said first and second pluralitiesof gas outlets are distributed with respect to a circumference of saidannular lid plate, and wherein said first plurality of gas outletsalternates with said second plurality of gas outlets along saidcircumference.
 12. The gas delivery system of claim 9 wherein said firstplurality of gas outlets comprises a first pair of gas outlets and saidfirst arc length corresponds to a half circle, and said second pluralityof gas outlets comprises a second pair of gas outlets offset from saidfirst pair of gas outlets by a quarter circle.
 13. The gas deliverysystem of claim 12 wherein said gas delivery block is disposed at alocation that is offset from the output end of each of the gas supplychannels by an arc length of a quarter circle.
 14. The gas deliverysystem of claim 9 wherein each of said first and second pluralities ofgas distribution channels further comprises a flow transition elementconnected between said output end of said gas supply channel and saidmiddle zone of said gas delivery channel.
 15. The gas delivery system ofclaim 14 wherein said flow transition element comprises: a radialtransition conduit axially displaced relative to said gas supplychannel; an axial input conduit coupled between said output end of saidgas supply channel and one end of said radial transition conduit; and anaxial output conduit connected between said middle zone of said gasdelivery channel and another end of said radial transition conduit. 16.The gas delivery system of claim 15 wherein said axial input conduitmeets an opening in said outlet end of said gas supply channel, and saidaxial output conduit meets an opening in said middle zone of said gasfeed channel.
 17. The gas delivery system of claim 9 wherein said gasnozzle comprises: a first plurality of radial elevated feed lines havingrespective input ends coupled to respective ones of said first pluralityof gas outlets and respective output ends overlying said inner gasinjection passage; a second plurality of radial elevated feed lineshaving respective input ends coupled to respective ones of said secondplurality of gas outlets and respective output ends overlying said innergas injection passage; a first plurality of axial drop lines connectedbetween said respective output ends and said inner gas injectionpassages; a second plurality of axial drop lines connected between saidrespective output ends and said outer gas injection passages.
 18. Thegas delivery system of claim 17 wherein: said first plurality of axialdrop lines intersect said inner gas injection passage at respective droppoints evenly spaced along said inner gas injection passage; said secondplurality of axial drop lines intersect said outer gas injection passageat respective drop points evenly spaced along said outer gas injectionpassage.
 19. The gas delivery system of claim 17 further comprising: afirst plurality of supply ports evenly spaced around a periphery of saidgas nozzle and connected to respective ones of said first plurality ofgas outlets; a second plurality of supply ports evenly spaced around aperiphery of said gas nozzle and connected to respective ones of saidsecond plurality of gas outlets, and offset from said first plurality ofgas supply ports; wherein said first plurality of supply ports areconnected to respective pairs of said first plurality of radial elevatedfeed lines, and said second plurality of supply ports are connected torespective pairs of said second plurality of radial elevated feed lines.20. The gas delivery system of claim 19 further comprising: a firstplurality of radial gas delivery conduits connected between respectiveones of said first plurality of gas outlets and said first plurality ofsupply ports; a second plurality of radial gas delivery conduitsconnected between respective ones of said second plurality of gasoutlets and said second plurality of supply ports.